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TUTORIALS

AFTERNOON SESSION: 1.00 PM to 4.30 PM

T4: MEMS AND APPLICATIONS
Dr. Navakanta Bhat and Dr. Sayanu Pamidighantam (about the Speakers)
Department of Electrical Communication Engineering
Indian Institute of Science, Bangalore, India

Abstract: Micro Electro Mechanical Systems (MEMS) have opened up a new possibility of miniaturisation. The MEMS revolution is expected to play a key role in the 21st century, similar to the Silicon Integrated Circuits (IC) revolution in the 20th century. With MEMS technology it is possible to integrate sensing, control and actuation in a single chip by combining multitude of building blocks such as mechanical structures, electronics circuits, optical devices, chemical and biological sensors etc. Hence the application domain of MEMS spans diverse fields such as Inertial MEMS, Optical MEMS, Bio MEMS RF MEMS.

This tutorial will present an overview on applications of MEMS in various fields. Then it will focus specifically on RF MEMS development. The design, fabrication and characterization of some of the RF MEMS components such as varactor, resonator and switch will be described. Finally the packaging issues for MEMS will be presented.

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