
	EDS Washington/Northern Virginia Chapter

	Welcome! We hope that you can join us to meet colleagues in your field, share information and network. If you would like to take a more active part in the Chapter activities, please contact Murty Polavarapu at murty.polavarapu@baesystems.com . Announcements IEEE Electron Devices Society Northern Virginia / Washington Chapter IEEE Electron Devices Society – Northern Virginia/Washington Chapter Meeting (co-sponsored by IEEE Sensors Council – Washington/Northern Virginia Chapter) is pleased to sponser: Microbolometer Sensor Arrays - Material and Process Issues in Manufacturing Sandra Hyland, PhD BAE Systems, Manassas VA Date: Wednesday, June 10, 2009 Time: Refreshments at 6:15PM; Talk begins at 6:45PM Place: George Mason University, Room 3207 of Engineering Building (Formally Academic VI). It is next to Research I and opposite to the Aquatic center. The campus map at http://eagle.gmu.edu/map/fairfax.php shows this location as “Future Site of Academic VI”. Directions: http://www.gmu.edu/gmu/Directions-to-GMU.html Parking: Consult campus map at http://eagle.gmu.edu/map/fairfax.php. Please use Sandy Creek Parking Deck or Mason Pond Parking Deck (near the Center for Performing Arts). Present the ticket to the meeting organizer for validation. RSVP: For more information, contact Murty Polavarapu at murtyp@ieee.org or at 703-367-1497. Abstract: Microbolometer sensor arrays provide “night vision” and are used in a variety of applications sensing infrared radiation from such sources as people, vehicles, and engines in low-visibility environments. Manufacturing microbolometers, which measure temperature to sense infrared light, requires selecting materials that both fulfill the necessary temperature-sensing task and are compatible with manufacturing capabilities. The integration of process capabilities for both CMOS processing and MEMS processing introduces constraints on materials, deposition and etching processes, and critical dimensions. This talk will review a manufacturing flow for uncooled microbolometer sensor arrays and discuss the relevant materials and processing trade-offs made to create the final sensing array. Speaker Bio: Sandra Hyland, Ph.D. has 25 years experience in semiconductor manufacturing and program management. She is currently a senior semiconductor engineer at BAE systems as the technical lead for microbolometer products at the Manassas, VA, foundry. In her previous job, she served in various positions at Tokyo Electron, including etch process manager for TEL’s technology center in Albany, NY, and as the etch process manager for the eleven-person group supporting customers on the East coast. Prior to her management assignment, she was an etch process engineer supporting Dominion Semiconductor and National Semiconductor. She has also served as a staff officer at the National Research Council’s National Materials Advisory Board and as an advisory engineer at IBM. Dr. Hyland has a Ph.D. in materials science and engineering from Cornell University, an M.S. in electrical engineering from Rutgers University, and a B.S. in electrical engineering from Rensselaer Polytechnic Institute. Dr. Hyland is a member of the American Vacuum Society, Electrochemical Society, and the Institute of Electrical and Electronic Engineers. She is a fellow of the Society of Women Engineers, and currently chairs the National Research Council’s Committee on Engineering Aviation Security Environments - False Positives from Explosive Detection Systems.
	Past Meetings April 23, 2009 SiC Vertical-Channel JFETs for RF and Power Switching Applications Dr. Victor Veliadis Northrop Grumman Advanced Technology Center February 24, 2009 Electronics from the Bottom Up: An Approach to 21st Century Electronic Devices Mark Lundstrom Purdue University Network for Computational Nanotechnology September 10, 2008 View into the Aerospace and Defense Industry's Interests and Needs in Nanotechnology Sharon Lee Smith, Director Advanced Technology,Corporate Engineering and Technology, Electronic Systems Lockheed Martin April 17, 2008 Single Spin Logic: How to compute with single electron spins Dr. Supriyo Bandyopadhyay Department of Electrical and Computer Engineering Virginia Commonwealth University Richmond, VA Sept 20, 2007 GaN-on-Silicon RF Power Devices: Current State and Future Directions Dr. Kevin Linthicum Nitronex Corp April 26, 2006 Applications of Semiconductor-Based DNA MicroArrays in Medicine Presentations by Dr. Amit Kumar, President, CEO Combimatrix Corporation Dec 6, 2005 Nanomaterials Presentations by Paul Franklin Nealey, University of Wisconsin and Alex Nugent, KnowmTech, LLP Nanomaterials Used In Lithographic Processes Nov 8, 2005 Terahertz-Frequency Sensing Science & Electronic Technology for Defense Dr. Dwight Woolard Army Research Office, U.S. Army Research Laboratory Sept 26, 2005 Advances in Semiconductor Technology – Are we ready for 45nm? Hans Stork Senior Vice President and Chief Technology Officer Texas Instruments EDS Distinguished Lecturer Jun 28, 2005 Nanotube Electronics: An enabling platform for beyond-CMOS technologies Jimmy Xu (web site) Electron Devices Society Distinguished Lecturer Charles C. Tillinghast University Professor Engineering and Physics Brown University Apr 27, 2005 Spin Torque and Nanorings Chia-Ling Chien Department of Physics and Astronomy Johns Hopkins University Apr 17, 2005 Organic Electronics Applications Atlantic Nano Forum Mar 17, 2005 Nanotechnology & Semiconductors Applications Atlantic Nano Forum Feb 17, 2005 Evolution of RF MEMS Switches for Microwave Frequency Dr. Charles L. Goldsmith MEMtronics Corp Oct 28, 2004 Inovative Technologies II Atlantic Nano Forum Sept 28, 2004 Nanomaterials Atlantic Nano Forum July 29, 2004 Innovative Technologies Atlantic Nano Forum May 26, 2004 Nanotech Tools: Part II Atlantic Nano Forum May 12, 2004 Solid State Lighting Michael Shur Patricia & Sheldon Roberts Professor, ECSE and Physics Rensselear Polytechnic Institute Director, Center for Broadband Data Transport Apr 29, 2004 Nanotech Tools: Accelerating the Development of Nanotechnology Atlantic Nano Forum Mar 9, 2004 Nanoelectronics 101 Atlantic Nano Forum Feb 10, 2004 Power Amplifiers: Technology and Design Techniques Dale Dawson Northrop Grumman Corporation Fall 2003 Lecture Series on Nanotechnology and its Applications May 22, 2003 Scaling and Reliability Issues of Extremely Scaled Fully Depleted SOI MOSFETs Dr. Dimitris E. Ioannou Department of Electrical and Computer Engineering George Mason University April 30, 2003 Spin Based Quantum Computers S. Bandyopadhyay Department of Electrical Engineering Virginia Commonwealth University March 31, 2003 Low Noise Avalanche Photodiodes Distinguished LEOS Lecturer Dr. John David Electronic Engineering from the University of Sheffield January 9, 2003 Vacuum Electronics for the 21^st Century Dr. Baruch Levush Vacuum Electronics Branch Naval Research Laboratory November 12, 2002 DRAM Technology Evolution - Past Trends and Future Projections Scott Meikle Engineering Manager – 300mm Micron Technology, Inc. Manassas, VA AND Tour of Micron Technology Fab October 10, 2002 Transmit / Receive Modules for Phased Array Antennas Mr. Bruce Kopp Applied Physics Lab Johns Hopkins University, Baltimore, MD. September 18, 2002 An InAs Based Transistor Approach to Terahertz Electronics: Concepts and Materials Science Dr. Jerry Woodall, National Medal of Technology Laureate IEEE EDS Distinguished Lecturer C.Baldwin Sawyer Professor of Electrical Engineering Yale University, New Haven, Connecticut May 30, 2002 Semiconductor Devices for Fiber-Optic Communication Systems Dr. Leda Lunardi IEEE EDS Distinguished Lecturer Optical Networks Research JDS Uniphase Corp. April 4, 2002 INanoVA – The Nanotechnology Hub of Virginia Dr. Nathan Swami Director, Initiative for Nanotechnology in Virginia (INanoVA) University of Virginia Charlottesville, VA March 14, 2002 High Speed Analog-to-Digital A/D Conversion for RF and Digital Receiver ApplicationsDr. Joseph F. Jensen HRL Laboratories February 21, 2002 Technology Choices For Multifunctional Adaptive Radio, Radar, and Sensors Dr. Michael Steer North Carolina State University November 1, 2001 MEMS Program at DARPA: Current Thrust Areas and Future Vision Dr. William C. Tang Microsystems Technology Office, DARPA October 4, 2001 Silicon Technology Trend from Past to Future - downsizing from millimeter to nanometer (large file) Hiroshi Iwai Tokyo Institute of Technology Tokyo, Japan September 13, 2001 Vacuum Electronics for the 21^st Century Dr. Robert Parker Naval Research Laboratory Washington, D.C. May 22, 2001 Phase Change Memory Devices Edward Spall Ovonyx, Inc. Manassas, Virginia November 16, 2000 Toward VLSI Photonics Dr. Brent Little University of Maryland, College Park Maryland, MD and Massachusetts Institute of Technology, Cambridge, MA May 4, 2000 Wide Bandgap Semiconductor Microwave Power Amplifiers Dr. Robert J. Trew Director of Research ODUSD(S&T) U.S. Department of Defense Arlington, VA 22203 April 5, 2000 Smart Pixel Optical Interconnects for VLSI Electronics Dr. Elias Towe Microsystems Technology Office Defense Advanced Research Projects Agency, Arlington, VA DARPA's VLSI Photonics Overview & Slides December 14, 1999 Spintronics - Electronics for the New Millennium Dr. Stuart A. Wolf Defense Sciences Office of Defense Advanced Research Projects Agency, Arlington, VA October 19, 1999 Implications of Trends in the Silicon industry on the Compound Semiconductor Industry: Do we need a Technology Roadmap for Compound Semiconductors? Dr. Herbert S. Bennett National Institute of Science and Technology and a Distinguished Lecturer of EDS Slides Officers Chair: Prof. Dimitris Ioannou George Mason University Telephone: (703) 993 -1580 Vice-Chair: Michael Hurt Micron Technology, Inc. Email: mhurt@micron.com Telephone: (703) 396-1247 Treasurer: Dinu Patel BAE Systems Email: dinu.patel@baesystems.com Past-Chairs: Murty Polavarapu BAE Systems Email: murtyp@ieee.org Telephone: (703) 367-1497 Hrayr A. Sayadian Sayadian Patent Law Office Tel: (703) 831 4161 Fax: (703) 831 4161 has@sayadian.com GMU Contact: Prof. Dimitris Ioannou George Mason University Telephone: (703) 993 -1580 Web Page Content: Michael Hurt Email: mhurt@micron.com Telephone: (703) 396-1247 Links IEEE Home EDS Home EDS Chapters IEEE Opera (Online Periodicals and Research Area)

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