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ICITA 2004
IEEE Orlando Section

ED/CPMT
(Electron Devices / Components, Packaging,
and Manufacturing Technology)

Meeting Announcement


Unless otherwise stated, non-IEEE members are welcome to attend the meetings listed here. Members are encouraged to invite and bring guests to these events.

ED/CPMT Seminar
CMOS-MEMS: Process, Design and Applications

When:

Wednesday, June 18, 2003
1:30 PM

Where:

Room 232, Computer Science Building, UCF

Speaker:

Huikai Xie, University of Florida

Contact:

Anwar Sadat, anwarsadat@ieee.org

Abstract:

MEMS (MicroElectroMechanical Systems) technology has grown rapidly in recent years and its applications range from consumer electronics, automobiles and medicine to healthcare. Compatibility of MEMS fabrication with mainstream CMOS technologies not only provides high sensitivity, on-chip "smart" conditioning circuitry and low cost, but also has such advantages as scalability, multi-vendor accessibility and short design cycles. In this talk, I first introduce a bulk silicon based CMOS-MEMS process and then I focus on two applications: inertial sensors and micromirrors. Based on the CMOS-MEMS process, we developed a unique technique to realize three-dimensional motion sensing and actuation that is essential to realize integrated inertial measurement units (IMUs) for navigation, guidance and control of vehicles, spacecrafts and missiles. I will briefly introduce a few example devices including an accelerometer and a gyroscope. I will also talk about the micromirrors, which use the same technique, and their applications in optical coherence tomographic (OCT) imaging. We assembled the first ever micromirror-based endoscopic OCT imaging system for in vivo imaging of biological tissue. Our preliminary experiments show very promising resolution and scanning speed. This work opens the possibility to make compact, high-performance and low-cost OCT catheters and endoscopes for future clinical applications by using MEMS technology.

Bio:

Huikai Xie is an Assistant Professor at the Department of Electrical and Computer Engineering of the University of Florida. He received his MS in electro-optics from Tufts University in 1998, and PhD degree in electrical and computer engineering from Carnegie Mellon University in 2002. He also holds BS and MS degrees in electronic engineering from Beijing Institute of Technology. From 1992 to 1996, he was a faculty member in the Institute of Microelectronics at Tsinghua University, Beijing, working on various silicon-based chemical and mechanical sensors. His current research interests include integrated microsensors and microactuators, optical MEMS, optical switching, biomedical imaging and sensing, and fiberoptic sensors.


 

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