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ICITA
2004
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IEEE
Orlando Section
ED/CPMT
(Electron Devices / Components, Packaging,
and Manufacturing Technology)
Meeting
Announcement
Unless otherwise stated,
non-IEEE members are welcome to attend the meetings
listed here. Members are encouraged to invite and
bring guests to these
events.
ED/CPMT Seminar
CMOS-MEMS:
Process, Design and
Applications
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When:
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Wednesday, June 18, 2003
1:30 PM
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Where:
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Room 232, Computer Science Building,
UCF
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Speaker:
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Huikai Xie, University of
Florida
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Contact:
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Anwar Sadat, anwarsadat@ieee.org
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Abstract:
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MEMS (MicroElectroMechanical Systems) technology
has grown rapidly in recent years and its
applications range from consumer electronics,
automobiles and medicine to healthcare.
Compatibility of MEMS fabrication with mainstream
CMOS technologies not only provides high
sensitivity, on-chip "smart" conditioning circuitry
and low cost, but also has such advantages as
scalability, multi-vendor accessibility and short
design cycles. In this talk, I first introduce a
bulk silicon based CMOS-MEMS process and then I
focus on two applications: inertial sensors and
micromirrors. Based on the CMOS-MEMS process, we
developed a unique technique to realize
three-dimensional motion sensing and actuation that
is essential to realize integrated inertial
measurement units (IMUs) for navigation, guidance
and control of vehicles, spacecrafts and missiles.
I will briefly introduce a few example devices
including an accelerometer and a gyroscope. I will
also talk about the micromirrors, which use the
same technique, and their applications in optical
coherence tomographic (OCT) imaging. We assembled
the first ever micromirror-based endoscopic OCT
imaging system for in vivo imaging of biological
tissue. Our preliminary experiments show very
promising resolution and scanning speed. This work
opens the possibility to make compact,
high-performance and low-cost OCT catheters and
endoscopes for future clinical applications by
using MEMS technology.
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Bio:
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Huikai Xie is an Assistant Professor at the
Department of Electrical and Computer Engineering
of the University of Florida. He received his MS in
electro-optics from Tufts University in 1998, and
PhD degree in electrical and computer engineering
from Carnegie Mellon University in 2002. He also
holds BS and MS degrees in electronic engineering
from Beijing Institute of Technology. From 1992 to
1996, he was a faculty member in the Institute of
Microelectronics at Tsinghua University, Beijing,
working on various silicon-based chemical and
mechanical sensors. His current research interests
include integrated microsensors and microactuators,
optical MEMS, optical switching, biomedical imaging
and sensing, and fiberoptic
sensors.
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