Tuesday March 15th, 2011
Western Digital, 1710 Automation Parkway, San Jose, CA
Directions and Map
Cookies, Conversation &
Pizza too at 7:00 P.M.
Presentation at 7:30 P.M.
Fabricating bit patterned media by block copolymer directed assembly
Dr. Ricardo Ruiz
HGST, Inc.
Abstract
With the demonstration of feature density multiplication by directed self
assembly, block copolymer templates stand as one of the most promising
routes to fabricating templates for thermally stable magnetic recording
media at densities beyond 1Tbit/in2 (below 25nm full-pitch). Nanofabrication
challenges in magnetic bit patterned media (BPM), however, reach far beyond
pattern formation. I will review recent progress at Hitachi GST in all
aspects involving template nanofabrication by directed assembly. These
include control over feature size uniformity, bit shape, placement accuracy,
metrology, distorted lattices on circular tracks, high fidelity pattern
transfer, magnetic BPM fabrication and, more recently, the impact of bit
size uniformity on the magnetic switching field distribution. In all these
aspects, the high uniformity of block copolymer patterns outperforms that of
e-beam lithography alone bringing an exciting opportunity for self-assembly
in time for bit patterned media technology |