Fabrication Steps of an FET and a BJT

The fabrication steps of a pair of Metal-Oxide-Semiconductor (MOS) Field Effect Transistor (FET) and a Bipolar Junction Transistor (BJT) on a Silicon wafer is illustrated in this applet.  The four buttons, 'first', 'previous', 'next', and 'last' let you view the static images at various points of the device fabrication.  These static images are similar to the illustrations found in textbooks, web pages (see, for example, the Univ. Illinois ECE344 page). The 'animate_next' button shows you through the animated 'time sequence' of the fabrication flow from this step to the next step.  As you can see, the animation capability teaches you most clearly the detailed physical steps involved.  The fabrication steps of Semiconductor Devices involve many physical, chemical and thermal steps which this applet let you understand.

Copyright (c) Xinran Wang, Ming Lu , Chu R. Wie, 1998 - 2000.