5-4-02
Tutorial Session I
Sensors & Systems Applications
1. Technology,
Principles, and Applications of Inertial Micro-Electro-Mechanical
Sensors
Andrei M. Shkel and Sukhan Lee#
Mechanical & Aerospace Engineering
Electrical & Computer Engineering
University of California, Irvine, USA
#Samsung Advanced Institute
of Technology (SAIT)
Korea
Abstract: This tutorial covers
three major topics related to technology, physics, and applications of
micro-scale inertial sensors (accelerometers and gyroscopes). The
first part provides a basic introduction to technology of MEMS,
covering primary questions needed to evaluate micro-machining as a
technology of choice for inertial micro-sensors. Three technologies,
surface micromachining, bulk micromachining, and mixed fabrication
processes, will be introduced and compared. The second part of the
tutorial will be devoted to (i) overview of research and development
efforts world-wide; (ii) introduction to the principles of operation
and detection; (iii) review of advantages and challenges; and (iv)
speculation about possible future design trends. The tutorial will be
concluded by highlighting a wide range of applications enabled by
inertial micro-sensors and discuss future opportunities for this
sensor technology in medicine, robotics, personal navigation, and
consumer electronics.
Biographies: Andrei M. Shkel is
an Assistant Professor in the Department of Mechanical & Aerospace
Engineering at the University of California, Irvine. He is also the
Director of the UCI Micro-Systems Laboratory. Dr. Shkel's research
interests are in Design, Fabrication, Packaging, and Advanced Control
of Integrated Microelectromechanical Systems (MEMS) for Bio-medical,
Communication, and Inertial Applications. He served as a reviewer for
more than a dozen major journals and international conferences in
these areas, published over 40 papers in archival journals and
international conferences, and organized/co-organized several
tutorials on MEMS technology and sensors-related symposia,
conferences, and special conference sessions. Dr. Shkel is an
associate member of the IEEE, ASME, and SPIE.
Dr. Sukhan Lee is currently an
Executive Vice President of Samsung Advanced Institute of Technology (SAIT),
the Corporate R&D Center for Samsung. He is currently serving as a
CRO (Chief Research Officer) overseeing Micro/Nano Systems
Technologies. He is also leading a team for breakthrough research.
Prior to joining SAIT in 1998, Dr. Lee has been a Professor of
Electrical Engineering and Computer Science at the University of
Southern California (USC) since 1983. He has also been a Senior Member
of Technical Staff at the Jet Propulsion Laboratory (JPL), California
Institute of Technology, since 1990. Dr. Lee received his Ph.D. in
Electrical Engineering from Purdue University, West Lafayette,
Indiana, in 1982, and his M.S. and B.S. in Electrical Engineering from
Seoul National University, Korea, in 1972 and 1974, respectively. He
has been elected as an IEEE Fellow in 1998, and elected as a Member of
Korean National Science of Academy in 1999. He is currently a Vice
President of the Korean Sensor Society and a Vice President of the
Korean Electrical and Electronics Materials Society.
2. Electronic
Noses: Towards a Smart Nose-on-a-chip
Julian W. Gardner,
School of Engineering,
University of Warwick,
U.K.
Abstract: In the first part of
this tutorial, an overview is given of the microtechnologies and
signal processing methods employed in the different types of
electronic noses reported to date and recent effort being made towards
the development of a smart "nose-on-a-chip" - that is a
small, micro-machined electronic nose with some level of intelligence.
In the second part of the tutorial, the
different types of commercial electronic noses are reviewed form the
large desktop PC based systems through to the small portable, handheld
units. Then the applications of electronic noses are described from
quality assurance in the foods & drinks industries through to
automotive engineering and more tentative biomedical diagnostics.
Finally the marketplace for odour sensors and electronic noses is
examined and some thoughts presented on their successful future
potential to disrupt/create mass markets.
Biography: Julian W. Gardner BSc
PhD DSc CEng FIEE MIEEE is Professor of Electronic Engineering in the
School of Engineering at Warwick University. He has worked in the
field of microsensors for 15 years and pioneered research in to the
emerging field of machine olfaction and electronic noses. He runs a
research group on smart devices and is author or co-author of over 250
technical papers and patents as well as six technical books - several
on electronic noses. Interested readers are referred to
"Electronic Noses: principles and application", 1999, Oxford
University Press, by Gardner and Bartlett.
3. Optical Fiber
Sensors
Richard O. Claus
Bradley Department of Electrical and Computer Engineering
Department of Materials Science and Engineering
Director, Fiber & Electro-Optics Research Center
Blacksburg, VA, USA
Abstract: Optical fiber sensors
have been developed during the past twenty-five years for numerous
measurement system applications. In many cases they have distinct
performance advantages over conventional sensing approaches for use in
harsh environments or where massive sensor multiplexing is required.
This talk describes optical fiber sensor fundamentals and gives
examples of specific uses in both laboratory and field instrumentation
applications.
Biography: Richard Claus
received B.E.S. and Ph.D. degrees from the Johns Hopkins University in
the 1970s. Since 1977 he has served on the engineering faculty at
Virginia Tech where he is currently the Lewis A. Hester Chair of
Engineering and the director of the Fiber & Electro-Optics
Research Center. With colleagues and students, he has authored more
than 800 journal and conference papers and 29 issued patents. He has
received research awards from SPIE, OSA, ASME and ASCE for work
related to optical fiber sensors and materials. In 2002, he is serving
as the Technical Chair of the Optical Fiber Sensors (OFS) Conference
in Portland, Oregon.
4. Magnetic
Sensor Microsystems
Rade S. Popovic
Swiss Federal Institute of Technology Lausanne (EPFL)
Lausanne, Switzerland
Abstract: This course shall give
you an insight into the magnetic sensor microsystems with the highest
industrial impact. They are based on Hall, AMR, GMR, Inductive, and
Flux-Gate magnetic sensors. We will start with a summary of a few
relevant basic physical phenomena. Then we will explain how we can
exploit these phenomena and their combinations in magnetic sensor
devices; and how we can combine these devices with electronic circuits
in order to amplify the useful signal and suppress parasitic
influences, such as offset, noise, and temperature effects. Finally,
we will discuss some successful realizations of the corresponding
magnetic sensor microsystems and their applications.
Biography: Radivoje S. Popovic
obtained Dipl. Ing. degree in engineering physics from the University
of Belgrade, and M.Sc. and Dr.Sc. from the University of Nis,
Yugoslavia. From 1969 to 1981 he worked for Ei, Nis, Yugoslavia. From
1982 to 1993 he was with Landis & Gyr, Zug, Switzerland,
responsible for research in sensor microsystems, and became Vice
President R&D. Currently, he is professor for microsystems at the
Swiss Federal Institute of Technology Lausanne (EPFL), Switzerland.
His interests include sensors for magnetic and optical signals. Mr.
Popovic is founder of the magnetic sensor company SENTRON AG, Zug,
Switzerland, and is an IEEE EDS Distinguished Lecturer.
Tutorial Session II
Sensors Engineering: State of the Art & Perspectives
5. Measurement
System Design and Evolution
Patrick L. Walter
Endevco Corporation
San Juan Capistrano, CA, USA
Abstract: The focus of this
tutorial is on providing guidance to optimize measurement system
design. It first looks back at some of the historic beginnings of
pressure, force, acceleration, and strain measurements. It then
provides an introduction to the key considerations that should be
applied to measurement systems being designed for test and control
applications. Rules of thumb that can be applied to data before
accepting them as valid for subsequent analyses are also provided.
Last covered in this tutorial are future trends in measurement systems
such as MEMS, wireless data transmission, and smart transducers.
Biography: Dr. Walter was
employed for 30 years at Sandia National Laboratories in Albuquerque,
NM. The majority of this time he managed various flight, field, and
laboratory test activities. In 1995, Dr. Walter joined the Engineering
Department of Texas Christian University. Since 1996, he has also
performed technical consulting at Endevco Corporation. Dr. Walter has
numerous publications, has served and chaired DoD and DOE committees,
and lectures in measurement system design. He is a member of
Instrument Society of America (chairs Blast, Shock, and Vibration in
Aerospace Systems Division and Associate Director Education in Test
Measurements Division), Society of Experimental Mechanics, American
Society of Engineering Educators (Instrumentation and Design
Divisions), and is a licensed professional engineer.
6. Low-offset DC
Amplifiers for Sensors
Kofi Makinwa
Electronic Instrumentation Laboratory - DIMES
Delft University of Technology
Mekelweg 4, 2628 CD
Delft, The Netherlands
Preliminary Abstract: In recent
years, several new techniques have been developed to reduce offset in
CMOS amplifiers and comparators. New chopping techniques in
particular, make it possible to reduce amplifier offset to the sub-microvolt
level. This tutorial will cover the use of chopping and auto-zeroing
in the design of CMOS interface circuitry for sensors. Examples of the
use of these techniques in SMART wind, temperature and magnetic
sensors will be given.
Biography: Kofi Makinwa was born
in Accra, Ghana on April 3rd 1964. He studied at the Obafemi Awolowo
University, Ile-Ife, Nigeria where he received a B.Sc. degree (1st
class hons.) in 1985 and an M.Sc. degree in 1988, both in Electronic
Engineering. He then proceeded to the Philips International Institute,
Eindhoven, The Netherlands where he received an M.E.E. degree (with
distinction) in 1989. He began his working career in 1989 as a
research scientist at Philips Research Laboratories in Eindhoven, a
position he held till 1999. During this period he developed electronic
systems for interactive displays, and for optical and magnetic storage
systems. He is currently at Delft University of Technology, Delft, The
Netherlands where he is working towards a Ph.D. on 2-D thermal flow
sensors. He holds nine patents.
7. Technologies
for sensor and microsystem fabrication
Martin A.M. Gijs
Institute of Microelectronics and Microsystems
Swiss Federal Institute of Technology Lausanne (EPFL)
CH-1015 Lausanne
Switzerland
Abstract: A good control and
mastering of technology always is a prerequisite for the correct
functioning of a miniaturized sensor or microsystem. Subsequently,
technologies related to the realization of structures in Si, metals,
glasses and polymers will be discussed. For example, microfabrication
of Si inertial sensors requires knowledge on Chemical Vapor Deposition
techniques, lithography, as well as on wet and dry etching. For the
realization of metallic sensor microstructures, as present in a
magnetic read head, technologies like electroplating and thin film
sputter deposition are important. Glass is an important material for
the realization of microfluidic devices and various glass etching and
bonding technologies will be discussed. Finally, polymers and plastics
form a fourth important category of materials. The use of functional
thick resists, micromoulding and high-precision microfabrication of
structures using the LIGA technique will be presented.
Biography: Martin A.M. Gijs
received his degree in physics in 1981 from the Katholieke
Universiteit Leuven, Belgium and his Ph.D. degree in physics at the
same university in 1986. He joined the Philips Research Laboratories
in Eindhoven, The Netherlands, in 1987. Subsequently, he has worked
there on micro-and nano-fabrication processes of high critical
temperature superconducting Josephson and tunnel junctions, the
microfabrication of microstructures in magnetic multilayers showing
the giant magnetoresistance effect, the design and realisation of
miniaturised motors for hard disk applications and the design and
realisation of planar transformers for miniaturised power
applications. He is since 1997 with the Swiss Federal Institute of
Technology Lausanne (Ecole Polytechnique Fédérale de Lausanne) as a
professor heading the Microsystems Technology group within the
Institute of Microelectronics and Microsystems. His main interests are
in developing new glass and magnetic device microfabrication
technologies and the development and use of microsystem technologies
for biomedical applications (bio-MEMS).
8. Modeling and
Simulation: Automatic Model Reduction
Jan G. Korvink and Evgenii Rudnyi
IMTEK-Institute for Microsystem Technology,
University of Freiburg,
Germany
Abstract: The rapid development
of MEMS-based devices requires a 3D time-dependent simulation for
coupled physical domains (thermal, mechanical, electrical, etc.). This
requires a solution of high dimensional ordinary differential
equations (ODEs), resulting from the space discretization of the
device, and hence, as a rule, parallel computing. However, instead of
a 'brute force' approach to integrate a large system of ODEs, one can
use modern mathematical methods to reduce its dimension. It happens
that in many cases of practical importance the order of ODEs can be
reduced by several orders of magnitude almost without sacrificing
precision. During the tutorial, you will learn: 1) How to reduce
relatively small linear systems up to 1000 order of ODEs with SLICOT
library, implementing the latest developments of modern control
theory; 2) How to employ implicit moment matching methods based on
Krylov subspaces (Arnoldi and Lanczos algorithms) to reduce huge
linear systems of ODEs; 3) What to expect from mathematicians in the
nearest future in order to be able to apply results from control
theory to large linear systems; 4) How to reduce nonlinear systems of
ODEs by means of Proper Orthogonal Decomposition.
Biography: Dr. Korvink holds the
chair of microsystem simulation at the University of Freiburg. He
received his D.Sc. from the Swiss Federal Institute of Technology
(ETH) in 1993, and his M.Sc. from the University of Cape Town in 1987.
Dr. Korvink was senior scientist at the Physical Electronics
Laboratory of the ETH before moving to Freiburg. He is co-author of
more than 40 technical articles in conference proceedings and
journals, and has co-authored one book chapter and the SOLIDIS
microsystem simulation software. He is co-founder and current chairman
of the CAD for MEMS international workshop. He serves on the program
selection committees of the IEEE-IEDM and the IEEE-MEMS. Dr Korvink is
the associate editor (Europe) for "Sensors and Materials",
MYUKK, Tokyo, Japan. He is a member of the IEEE and the ASME. His main
research interests are in the modelling and numerical simulation of
microsystems.
