Tutorials
Program
Tuesday,
October 21, 2003
Tutorials
Chair: Michiel J. Vellekoop
Abstracts
and Author Biographies of the Tutorials
Tutorial
Session I: Sensor
Devices
1.
ISFET, Theory and Practice
Piet Bergveld, University of
Twente, The Netherlands
Abstract:
Part I: ISFET,
operational mechanism
The latest theoretical insights in oxide/electrolyte interfacial phenomena show that the ISFET response to pH is dominated by the ratio of the surface buffer capacity and the interface double layer capacity. This insight forms also the basis for the development of FET sensors selective for other ions. Based on this theory the operation of ISFETs can be optimized. Furthermore ISFET based measurement systems can be developed in relation to specific application needs, such as dynamic measurements versus static measurements.
Part II: ISFET, applications and
commercialization.
ISFETs have been developed especially for measurements in small volumes with fast changes of the ionic composition. Therefore they can also be applied in sensor/actuator systems, such as a microliter titrator. About 20 companies have commercialized ISFETs, based on about 150 patents. It has been discovered that ISFETs behave especially good in non-aqueous solutions, resulting in various applications in food production.
Biography:
Piet Bergveld was born in Oosterwolde, The Netherlands, on January 26, 1940. He received the M.S. degree in electrical engineering from the University of Eindhoven, the Netherlands, in 1965 and the Ph.D. degree from the University of Twente, the Netherlands, in 1973. The subject of his dissertation was the development of ISFETs and related devices, the actual invention of the ISFET, since then also investigated by many international research groups of Universities as well as industry.
Since 1965 he has been a member of the Biomedical Engineering Division of the Faculty of Electrical Engineering (University of Twente) and was in 1984 appointed as Full Professor in Biosensor Technology. He is one of the project leaders in the MESA Research Institute. His research subjects still concern the further development of ISFETs and biosensors based on silicon technology as well as physical sensors, both for biomedical and environmental applications, resulting up to now in more than 350 papers and 25 PhD Theses. He was Research Dean from the Faculty of Electrical Engineering from 1994 to 1998 and received in 1995 the Jacob Kistemaker Award. He was founder and chairman of the international steering committee of the annual microTAS Symposia from 1994 to 2000. In 1997 he was appointed as a member of the Royal Netherlands Academy of Arts and Sciences. He received the Microsystems Leadership Award during microTAS 2002 in Nara, Japan and retired from the University of Twente in February 2003.
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2.
Magnetic Sensors: An Overview
Evangelis Hristoforou,
National
Technical University of Athens, Greece
Abstract:
In this tutorial we present an overview on the magnetic effects used in sensors and transducers, as well as the main applications of sensors based on magnetic materials. At first, we illustrate the two key parameters affecting the response of any magnetic device, which are the domain wall dynamics and the domain rotation dynamics, introducing the corresponding materials and the required tailoring processes. Consequently, we illustrate the main physical sensors based on magnetic effects and materials, mainly being position, mass, field, security temperature and other derivative sensors. Finally, we try to give an algorithm, according to which an engineer is able to develop a magnetic sensor, starting from the requirements of measurement and the material development & tailoring, up to the sensor housing, discussing also the future trends in magnetic sensor design.
Biography:
Evangelos Hristoforou was born in Thessaloniki, Greece in 1961. He received his Diploma in Electrical Engineering from the University of Patras, Greece in 1984 and his PhD in Electronic and Electrical Engineering from King’s College, University of London in 1991. Since 2000 he has been appointed as Assistant Professor in “Electronic Materials” at the National Technical University of Athens, Greece. He has published more than 70 papers in ISI journals in the field of magnetic materials and their applications, more than 40 papers in international conferences and he holds 9 patents.
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3.
Acoustic Microsensors
Ralf Lucklum, University of
Magdeburg, Germany
Abstract:
Resonant sensors are an attractive sensor class. Acoustic microsensors are one versatile group of resonant sensors. They have already a long tradition.
The tutorial introduces recent developments of acoustic microsensors, starting from quartz crystals and surface acoustic wave devices up to magnetically excited acoustic resonant sensors. Based on their major characteristics - acoustic-wave propagation - their sensing capabilities and properties will be discussed. Advantages and disadvantages of the most common types and promising new developments will be compared. Although acoustic microsensors used as physical sensors are available on the sensor market, the tutorial will concentrate on the challenging application as chemical or biosensors.
Finally, perspectives of sensor systems including acoustic microsensors as transducer element will be discussed. For example, integration of acoustic and microfluidic elements is expected to provide synergistic effects to significantly improve the capabilities, feasibility and reliability of (bio-)chemical acoustic microsensor systems.
Biography:
Ralf Lucklum was born in 1953 in Magdeburg, Germany. He studied Physics at the "Carl Schorlemmer" University of Technology in Leuna-Merseburg (1977) and received a PhD degree in 1983. In that year he became a lecturer at the Medical Academy Magdeburg, Department of General and Municipal Hygiene. In 1986 he moved to the Otto von Guericke-University Magdeburg where he is now an Associate Professor. His research focuses on acoustic microsensors for chemical and biochemical applications He published 38 articles in international journals and 41 in proceedings of international congresses.
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4.
Micro-optics for Micro-sensors
Hans Zappe, University of
Freiburg, Germany
Abstract:
Sensors based on light take advantage of a rich variety of optical phenomena to measure an equally rich spectrum of physical, biological or chemical processes. Developments in micro-optics now allow a wide range of these optical functions to be performed with components and systems of very small size.
This short course will survey some of the concepts and technologies basic to optical sensor microsystems. Micro-optical components, semiconductor lasers, waveguides and free-space micro-optics as well as optical hybridization and integration technologies will be considered. Theoretical basics will be followed by examples of laboratory sensor set-ups and a survey of some industrially successful optical sensor systems.
Biography:
Hans Zappe studied Electrical Engineering at the Massachusetts Institute of Technology (BS, MS, 1983) and at the University of California, Berkeley (PhD, 1989). He has worked at the IBM General Technology Division in Burlington, VT, USA, the Fraunhofer Institute for Applied Solid State Physics in Freiburg, Germany, as well as the Paul Scherrer Institute and the Centre Suisse d'Electronique et de Microtechnique (CSEM) in Zurich, Switzerland.
Prof. Zappe is presently Professor of Micro-optics and Dean of Studies at the Institute of Microsystem Technology at the University of Freiburg. His research interests focus on the development of optical microsystems for medical and communications applications.
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Tutorial
Session II: Sensor
Applications
5.
Oceanographic Sensors and Applications
David
Fries, University of South Florida, USA
Abstract:
This tutorial covers the topic of oceanographic sensors, in-water instrumentation, sensor platforms, and sensor networks. Examples of in-situ chemical, physical, and biological sensors and instruments will be reviewed and an overview of possible oceanographic measurement methods (e.g. optical and acoustic) will be given. Sensor networking, sensor communications and sensor packaging will be also addressed as well as methods to deploy sensors at sea. In addition, emerging sensors and new technologies (e.g. microsystems technology) for oceanic applications will be presented.
Biography:
David Fries is a Senior Engineer of Marine Sciences at the University of South Florida. He is an author of USF’s MEMS Program. His scientific work focuses on Underwater Mass Spectrometers, Autonomous Gene Sensors, and Fieldable Microsystems. Also, he has developed microlithography technology and is founder of Intelligent Micro Patterning. He is the original author of the National Forensic Science and Tech Center in Largo, Florida. Fries has four Patents issued, 12 pending, and over 20 publications in oceanography, analytical chemistry, medical technology, biotechnology, engineering, microtechnology, and robotics. He has a BS from the University of Pittsburgh, an MS at the University of South Florida, and a past appointment at Sandia National Laboratories/Lockheed Martin.
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6.
Electronic Noses: Towards a Smart Nose-on-a-chip
Julian Gardner,
University of
Warwick, UK
Abstract:
In the first part of this tutorial, an overview is given of the microtechnologies and signalprocessing methods employed in the different types of electronic noses reported to date and recent effort being made towards the development of a smart “nose-on-a-chip” - that is a small, micro-machined electronic nose with some level of intelligence.
In the second part of the tutorial, the different types of commercial electronic noses are reviewed form the large desktop PC based systems through to the small portable, handheld units. Then the applications of electronic noses are described from quality assurance in the foods & drinks industries through to automotive engineering and more tentative biomedical diagnostics. Finally the marketplace for odour sensors and electronic noses is examined and some thoughts presented on their successful future potential to disrupt/create mass markets.
Biography:
Julian Gardner BSc PhD DSc CEng FIEE MIEEE is Professor of Electronic Engineering in the School of Engineering at Warwick University. He has worked in the field of microsensors for 15 years and pioneered research in to the emerging field of machine olfaction and electronic noses. He runs a research group on smart devices and is author or co-author of over 250 technical papers and patents as well as six technical books – several on electronic noses. Interested readers are referred to “Electronic Noses: principles and application”, 1999, Oxford University Press, by Gardner and Bartlett.
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7.
Fuel Cells
Fritz Prinz, Stanford
University, USA
Abstract:
This tutorial will provide a brief overview of the physics and chemistry of fuel cells. After discussing thermodynamic principles, we will focus on fuel cells with polymeric and solid oxide electrolytes. Fundamentals of catalysis in fuel cells and mechanisms for ionic transport in thin electrolyte membranes form the backbone of the presentation. Defect chemistry of metal oxides and quantum considerations of oxygen ion diffusion will be outlined. The impact of feature size such as membrane thickness or flow channel diameter on the performance of fuel cells will also be analyzed. Comments on the future potential and short-term limitations of fuel cells will conclude the tutorial.
Biography:
Fritz B. Prinz is the R.H. Adams Professor of Engineering and Chair of the Mechanical Engineering Department at Stanford University. He conducts research on the design and fabrication of fuel cell devices. His research group builds nanoscale probes to investigate electrochemical phenomena in thin film electrolytes and biological systems.
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8.
Modeling and Simulation of MEMS Sensors
Wenjing Ye,
Georgia Institute of Technology, USA
Abstract:
This tutorial will present an overview of fundamental issues, challenges and emerging techniques in modeling and design of MEMS sensors. The first part of the tutorial will start with a brief introduction of MEMS technology and MEMS sensors, followed by fundamental issues and challenges in modeling and simulation of MEMS. Various numerical techniques intended to address these issues will be presented next. The second part of the tutorial focuses on applications. A micromachined magnetic sensor and a micro resonator (filter) will be analyzed and discussed in details.
Biography:
Dr. Wenjing Ye is an Assistant Professor in the Woodruff School of Mechanical Engineering at Georgia Institute of Technology. She received her Ph.D. degree from Cornell University in 1998 and was a Postdoctoral Associate at Massachusetts Institute of Technology during the period of 1998 to1999. Dr. Ye’s research interests are in the multiscale modeling of micro/nano systems, numerical techniques and design methodologies. To date she has authored and co-authored 16 refereed journal and conference publications and one book chapter. Dr. Ye is a member of the program committee for Modeling and Simulation of Microsystems since 2001 and has been served as session chair in various conferences.
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